1. The machine is made of imported Roland collar plates, which can work in acid corrosive environments for a long time. It is sturdy and durable, with double layer leak proof.

2. The structure adopts an external large acid tank for refrigeration and circulation to a small acid tank, which can corrode 4 ", 5", and 6 "silicon wafers.

3. Fully automatic operation design, easy and safe operation.

4. Temperature control capability RT~-20 ° C, temperature control accuracy ± 1 ° C.

5. The patented design of the refrigeration coil ensures long-term use without corrosion, resulting in excellent direct cooling effect.

6. Even Trenching, 130 μ M can reach ± 3 μ M.

7. The control part adopts imported brand PLC and HMI;

8. The front of the machine is equipped with one PTFE pure water gun and one PTFE nitrogen gun each placed on the right side.

9. The equipment design standards are implemented in accordance with the semiconductor industry standard (SEMI-S2-93), and the ISO9001 quality management system is standardized and guaranteed.

10. Domestic invention patent number: ZL20140082522.0